DU Xiangru *,FU Wei.Optimization of Process Parameters for Oxalic Acid Anodic Oxidation of Aluminum Substrates for Electronic Devices Power Module[J].Plating & Finishing,2022,(2):41-45.[doi:10.3969/j.issn.1001-3849.2022.02.009]
电子器件功率模块用铝基板草酸阳极氧化工艺参数优化
- Title:
- Optimization of Process Parameters for Oxalic Acid Anodic Oxidation of Aluminum Substrates for Electronic Devices Power Module
- 分类号:
- TN41
- 文献标志码:
- A
- 摘要:
-
采用草酸阳极氧化工艺对电子器件功率模块用铝基板进行表面处理，并考察了电解液温度、电流密度和氧化时间对氧化膜的厚度及腐蚀失重的影响。结果表明：电流密度从 1 A/dm2 增加到 3 A/dm2 ，氧化时间从 35 min 延长到 75 min ，氧化膜厚度都呈先增加后降低的趋势并且伴随着腐蚀失重先降低后增加。采用单一变量法得到铝基板草酸阳极氧化的最佳工艺参数为：电解液温度 25 ℃ 、电流密度 2 A/dm2 、氧化时间 55 min 。在最佳工艺参数下生成的氧化膜完整且均匀，呈蜂窝状多孔结构，厚度达到 18.2 μm 且腐蚀失重最低，为 2.72 mg/cm2 ，能对铝基板起到良好的腐蚀防护作用。
- Abstract:
-
Aluminum substrate for electronic devices power module was treated by oxalic acid anodic oxidation ， and the influences of electrolyte temperature ， current density and oxidation time on the thickness and corrosion weight loss of the oxidation films were investigated. The results showed that as the electrolyte temperature increased from 15 ℃ to 35 ℃ ， the current density increased from 1 A/dm2 to 3 A/dm2 and the oxidation time prolonged from 35 min to 75 min ， the thickness of oxidation films increased at first and then decreased ， and decreased first and then increased with corrosion weight loss. The optimal process parameters for oxalic acid anodic oxidation of aluminum substrates were obtained by single variable method as follows ： electrolyte temperature 25 ℃ ， current density 2 A/dm2 ， oxidation time 55 min. And the oxidation film formed under the optimal process parameters was complete and uniform ， with a honeycomb porous structure. The thickness of optimal oxidation film reached 18.2 μm and the corrosion weight loss was the lowest of 2.72 mg/cm2 ， it could play a good role in the corrosion protection of aluminum substrates.
参考文献/References:
[1] 王勇涛 , 张军 , 徐文 . 高导热阳极氧化铝陶瓷膜铝基板的研制 [J]. 绝缘材料 , 2015, 48(8): 19-22.
Wang Y T, Zhang J, Xu W. High thermal conductive MCPCB based on anodized oxide aluminum film [J]. Insulating Materials, 2015, 48(8): 19-22 (in Chinese).
[2] 王焕 . 智能功率模块用铝基板微弧氧化工艺研究 [D]. 广州 : 华南理工大学 , 2013.
[3] 张国元 . 铝基板表面氧化膜的制备及其绝缘导热性能研究 [D]. 西安 : 西安理工大学 , 2019.
[4] Dukhnovskii M P, Vedeneev A S, Gudkov V A, et al. Nanostructured layers of anodic aluminum oxide on insulating substrates [J]. Journal of Communications Technology and Electronics, 2012, (57): 91-94.
[5] Qiao N N, Nong Y L, Liang Y. Heterogeneous catalyst of porous anodic aluminum oxide with Al substrate supported metal nanoparticles [J]. Materials Chemistry and Physics, 2019, 225(1): 458-463.
[6] 黄凯龄 , 陈冠刚 , 麦东厂 , 等 . 铝基板阳极氧化膜工艺及影响其绝缘性的因素 [J]. 印制电路信息 , 2019, 27(4): 28-32.
Huang K L, Chen G G, Mai D C, et al. Anodic oxidation process and influential factors to insulated function of anodic oxidation film [J]. Printed Circuit Information, 2019, 27(4): 28-32 (in Chinese).
[7] Sun C X, Hao S Z, Wang Z J, et al. Rapid fabrication of iridescent alumina films supported on an aluminium substrate by high voltage anodization [J]. Optical Materials, 2020, (104): 109937.
[8] 王帅星 , 赵晴 , 杜楠 , 等 . 铈盐对铝合金硼酸 - 硫酸阳极氧化膜的封闭效应 [J]. 中国有色金属学报 , 2012, 22(4): 1132-1141.
Wang S X, Zhao Q, Du N, et al. Sealing effect of cerium salt on boric?sulfuric acid anodic film of aluminum alloy [J]. The Chinese Journal of Nonferrous Metals, 2012, 22(4): 1132-1141 (in Chinese).
[9] 任雅勋 . 铝及其合金常温草酸绝缘阳极氧化工艺 [J]. 材料保护 , 2002, 35(9): 31-32.
Ren Y X. Oxalic acid insulation anodizing of aluminum and its alloy at room temperature [J]. Journal of Materials Protection, 2002, 35(9): 31-32 (in Chinese).
[10] 刘莉 , 张鲲 , 熊辉辉 , 等 . 阳极氧化工艺对 6061 铝合金草酸氧化膜耐磨耐蚀性的影响 [J]. 材料热处理学报 , 2015, 36(11):225-232.
Liu L, Zhang K, Xiong H H, et al. Effect of anodizing process on corrosion and wear resistance of 6061 alloy anodic oxide films formed in oxalic acid [J]. Transactions of Materials and Heat Treatment, 2015, 36(11): 225-232 (in Chinese).
[11] Yang Y S, Cheng J, Liu S L, et al. Effect of NaAlO 2 sealing on corrosion resistance of 2024 aluminum alloy anodized film [J]. Materials and Corrosion, 2019, 70(1): 120-127.
[12] Abdullah M M, Jamaludin L, Razak R A, et al. Effect of concentration of oxalic acid on the synthesis of porous anodic alumina (PAA) on aluminum alloy AA6061 [J]. Materials Science Forum, 2016, (857): 281-285.
[13] 周雅 , 周佳 , 江溢民 . 2024-T3 铝合金硫酸、草酸和酒石酸常温硬质氧化工艺 [J]. 材料保护 , 2012, 45(2):45-48.
Zhou Y, Zhou J, Jiang Y M. Technology for room-temperature hard anodizing of aluminum alloy in mixed electrolyte consisting of sulfuric acid-oxalic acid-tartaric acid[J]. Journal of Materials Protection, 2012, 45(2): 45-48 (in Chinese).
[14] 吴璐莹 . 压铸铝合金环保型阳极氧化膜的制备与性能研究 [D]. 广州 : 华南理工大学 , 2010.
[15] 王海潮 , 彭乔 , 王啸宇 . 铝阳极氧化膜极限厚度的研究及氧化膜微观结构的表征 [J]. 材料保护 , 2006, 39(7): 17-19.
相似文献/References:
[1]周艳丽*.5052铝合金草酸阳极氧化和铬酸阳极氧化工艺研究[J].电镀与精饰,2021,(2):34.[doi:10.3969/j.issn.1001-3849.2021.02.0070]
ZHOU Yanli*.周艳丽*[J].Plating & Finishing,2021,(2):34.[doi:10.3969/j.issn.1001-3849.2021.02.0070]
[2]张境洁*,李云红.建筑铝材表面处理及其性能研究[J].电镀与精饰,2021,(12):12.[doi:10.3969/j.issn.1001-3849.2021.12.003]
ZHANG Jingjie,LI Yunhong.Surface Treatment of Construction Aluminum and Its Performance[J].Plating & Finishing,2021,(2):12.[doi:10.3969/j.issn.1001-3849.2021.12.003]
备注/Memo
收稿日期： 2021-04-19 修回日期： 2021-05-14 通信作者： 杜相如（ 1975 —），女，硕士，讲师，主要研究方向：电子技术、功能材料等， email ： edu1400du@126.com 基金项目： 国家级职业教育教师教学创新团队 2020 课题研究项目（ YB2020010302 ）