[1]王澳轩,才旺扎西,王 为.doi: 10.3969/j.issn.1001-3849.2026.03.002三维集成电路盲孔金属化镀液寿命关键影响因素研究[J].电镀与精饰,2026,(03):12-21.
　WANG Aoxuan CAIWANG Zhaxi WANG Wei.Study on key influencing factors of bath life in blind via metallization of 3D integrated circuits[J].Plating & Finishing,2026,(03):12-21.
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doi: 10.3969/j.issn.1001-3849.2026.03.002三维集成电路盲孔金属化镀液寿命关键影响因素研究()

《电镀与精饰》[ISSN:1001-3849/CN:12-1096/TG]

卷:
期数:
2026年03
页码:
12-21
栏目:
出版日期:
2026-03-31

文章信息/Info

Title:
Study on key influencing factors of bath life in blind via metallization of 3D integrated circuits
作者:
王澳轩1; 2; 才旺扎西1; 王 为1
(1. 天津大学 化工学院,天津 300072 ;2. 天津大学 储能科学与工程研究院,天津 300072)
Author(s):
WANG Aoxuan 1; 2CAIWANG Zhaxi 1WANG Wei 1
(1. School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China; 2. Institute of Energy Storage Science and Engineering, Tianjin University, Tianjin 300072, China)
关键词:
三维集成电路; 镀液寿命; 封孔率; 放置时间
Keywords:
3D integrated circuits;  bath life;  filling ratio(FR);  storage time
分类号:
TQ153.2 TG146.1
文献标志码:
A
摘要:
针对三维集成电路封孔镀铜技术中添加剂寿命有限的问题，为满足提高镀液寿命与镀层质量的工艺优化需求，采用循环喷射实验系统，研究了阴阳极间距、阴极电流密度、阳极材料、电镀温度及放置时间等因素对镀液寿命与镀层性能的影响。结果表明：在循环喷射条件下，采用极间距30 cm、阴极电流密度70 mA?cm-?、选用惰性Pt阳极及较低温度工艺，可显著提高镀液寿命与镀层质量，其中Pt阳极镀液寿命最高达1.24 Ah/L，且添加剂间的相互作用会加速镀液失效，需严格控制放置时间与配置条件。
Abstract:
Aiming at the issue of limited additive lifespan in via-filling copper electroplating technology, and in order to meet the process optimization requirements for improving the bath life and coating quality, a cyclic jet experimental system was employed. The effects of various factors of the bath life and coating performance, such as anode-cathode distance, cathode current density, anode material, plating temperature, and standing time were investigated. Results show that it can significantly enhance bath life and coating quality under cyclic jet conditions, which is the electrode spacing of 30 cm, a cathode current density of 70 mA?cm-2 and an inert Pt anode along with a lower process temperature. Specifically, the bath life with the Pt anode reached a maximum of 1.24 Ah/L. Furthermore, it is found that bath failure is accelerated due to the interaction of the additives, strictly control over standing time and formulation compatibility is needed .

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更新日期/Last Update: 2026-03-11