WEI Jie,WU Minxian,WANG Li,et al.Study on Low-Voltage Electrodeposition of Diamond-Like Carbon Films in Aqueous Solutions Containing Chlorinated-Acetic Acids[J].Plating & Finishing,2021,(7):35-40.[doi:10.3969/j.issn.1001-3849.2021.07.007]
氯代乙酸水溶液中低电压电沉积类金刚石薄膜的研究
- Title:
- Study on Low-Voltage Electrodeposition of Diamond-Like Carbon Films in Aqueous Solutions Containing Chlorinated-Acetic Acids
- 文献标志码:
- A
- 摘要:
- 采用电沉积技术，在低电压（3.0 V）下分别以乙酸、氯乙酸、二氯乙酸和三氯乙酸为碳源，在FTO导电玻璃基体上电沉积类金刚石薄膜。实验考察了氯代乙酸水溶液中氯原子的取代数量对类金刚石薄膜的厚度、形貌、结构以及电导率的影响。实验结果表明，在氯原子数量不同的氯代乙酸水溶液中电化学沉积类金刚石薄膜由易到难的顺序为：氯乙酸、乙酸、二氯乙酸、三氯乙酸。且在氯乙酸水溶液中电沉积所得薄膜的厚度以及电导率最大，在三氯乙酸水溶液中沉积的薄膜厚度及电导率最小，薄膜颗粒的粒径随着氯原子数量的增多而减小，薄膜的石墨化程度越来越强。
- Abstract:
- Diamond-like films were electrodeposited from aqueous solutions containing different chlorinated acetic acids, ie. acetic acid, chloroacetic acid, dichloroacetic acid and trichloroacetic acid on conductive-FTO glass substrates at a low voltage of 3.0 V, the effects of carbon sources on the thickness, morphology, structure and electric conductivity of the diamond-like films were investigated. The results showed that the film obtained from the aqueous solution containing chloroacetic acid had the largest thickness and the highest electric conductivity, comparing to the films obtained from other chlorinated acetic acids. The particle size of the film decreased with the increase in chlorine atoms, and the graphitization degree of the film became stronger.
参考文献/References:
[1] Ghosh B, Ghosh D, Ghosh A, et al. Electrodeposited diamond-like carbon (DLC) films on n-Si(100) substrates for photovoltaic application[J]. Materials Science in Semiconductor Processing, 2014, 25(1):30-36.
[2] Zou Y S, Zhou K, Wu Y F, et al. Structure, mechanical and tribological properties of diamond-like carbon films on aluminum alloy by arcion plating[J]. Vacuum, 2012, 86(8): 141-146.
[3] Zaharia T, Kudlacek P, Creator E M, et al. Improved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films[J]. Diamond and Related Materials, 2011, 20(9): 126-172.
[4] Gupta S, Roy R, Deb B, et al. Low voltage electrodeposition of diamond-like carbon films[J]. Materials Letters Mater Lett, 2003, 57(3): 479-485.
[5] Zhang Q, Wang Y, Wang W, et al. Low voltage and ambient temperature electrodeposition of uniform carbon films[J]. Electrochemistry Communications, 2016, 63(2):2-5.
[6] Cao C, Zhu H, Wang H. Electrodeposition diamond-like carbon films from organic liquids[J]. Thin Solid Films, 2000, 368(2): 203-207.
[7] Wang H, Shen M R, Ning Z Y, et al. Deposition of diamond-like carbon films by electrolysis of methanol solution[J]. Applied Physics Letters, 1996, 69(8): 74-76.
[8] Tsukada J, Zanin H, Barbosa L C A, et al. Electro-Deposition of Carbon Structures at Mid Voltage and Room Temperature Using Ethanol/Aqueous Solutions[J]. Journal of The Electrochemical Society, 2012, 159(3): 159-161.
[9] Zhu H S, Jiu J T, Fu Q, et al. Aroused problems in the deposition of diamond-like carbon films by using the liquid phase electrodeposition technique[J]. Journal of Materials Science, 2003, 38(1): 141-145.
备注/Memo
收稿日期： 2020-08-22；修回日期： 2020-10-19
*通信作者： 陈智栋，zdchen@cczu.edu.cn