Xu Wenhui,Liu Jie,Yuan Zhixiang,et al.Preparation and insulation properties of zirconia coating by magnetron sputtering[J].Plating & Finishing,2023,(7):68-73.[doi:10.3969/j.issn.1001-3849.2023.07.009]
磁控溅射法制备氧化锆涂层及其绝缘性能研究
- Title:
-
Preparation and insulation properties of zirconia coating by magnetron sputtering
- Keywords:
- ZrO 2 coatings ; insulation performance ; coating thickness ; microstructure ; magnetron sputtering
- 分类号:
- TB43
- 文献标志码:
- A
- 摘要:
- 电机轴承的绝缘对于提高电动汽车的电机寿命具有重要意义。采用直流反应磁控溅射方法和正交试验设计,研究了工作气压、氧气流量和沉积温度对 ZrO 2 绝缘涂层的影响。采用扫描电镜、 X 射线衍射仪及数字兆欧表对 ZrO 2 涂层进行截面形貌、表面形貌、涂层厚度、物相结构及绝缘性能进行分析。结果表明:绝缘电阻与涂层厚度的比值 R/t 最低为 635 M Ω / μ m 时,涂层厚度为 1.639 μ m ,绝缘电阻值为 1041 M Ω ;制备的 ZrO 2 涂层结构较为致密,呈现非晶态或单斜相,随着沉积温度和氧气流量的增加, ZrO 2 涂层结晶明显,且有 M- ZrO 2 ( -111 )晶面择优取向;氧气流量对涂层厚度影响最大,沉积温度对 R/t 的影响最大;涂层内部缺陷的增加和结构的疏松使得涂层绝缘性能降低,而涂层结晶度的增高及 M -ZrO 2 ( -111 )晶面的择优取向会使涂层绝缘性能增强。
- Abstract:
- : The insulation of motor bearings is of great significance for improving the motor life of electric vehicles. The effects of working air pressure , oxygen flow rate and deposition temperature on ZrO 2 insulating coating were studied by DC reactive magnetron sputtering method and orthogonal experimental design. The cross section morphology , surface morphology , phase structure , coating thickness and insulation properties of ZrO 2 coating were analyzed by scanning electron microscope , X-ray diffractometer and digital megohmeter. The results show that when the ratio of insulation resistance to coating thickness R/t is 635 M Ω / μ m , the coating thickness is 1.639 μ m , and the insulation resistance value is 1041 M Ω . The structure of the prepared ZrO 2 coating is relatively dense , showing amorphous or monoclinic phase. With the increase of deposition temperature and oxygen flow rate , the ZrO 2 coating crystallizes obviously , and has the preferred orientation of M -ZrO 2 ( -111 ) crystal plane. The oxygen flow rate has the greatest effect on the coating thickness , and the deposition temperature has the greatest effect on R/t . The increase of internal defects and the loose structure of the coating will reduce the insulation performance of the coating , but the increase of crystallinity and the preferred orientation of M -ZrO 2 ( -111 ) crystal surface will enhance the insulation performance of the coating.
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备注/Memo
收稿日期: 2022-09-06 修回日期: 2022-09-18 作者简介: 徐文慧( 1998 —),女,硕士研究生, email : xuwenhui565@163.com * 通信作者: 卢文壮, email : meewzlu@nuaa.edu.cn 基金项目: 国家自然科学基金项目( 51975287 )