Xu Xinying,Xiao Shucheng,Zhang Lulu,et al.Influence and mechanism of new leveler on through hole filling by copper electroplating[J].Plating & Finishing,2024,(5):92-100.[doi:10.3969/j.issn.1001-3849.2024.05.013]
新型整平剂对电镀铜填通孔的影响及机制探究
- Title:
- Influence and mechanism of new leveler on through hole filling by copper electroplating
- Keywords:
- through hole filling ; leveler ; butterfly technology ; chronopotentiometry with current ramp ; negative differential resistance effect
- 分类号:
- TQ153.1
- 文献标志码:
- A
- 摘要:
- 针对目前国内电子电镀专用化学品瓶颈问题，合成了一种由含氮杂环与含氧碳链组成的新型整平剂分子 SC-21 。通过哈林槽实验、循环伏安法 （ CV ）、计时电位法 （ CP & CPCR ）和电化学交流阻抗谱 （ EIS ）对比，研究了常见整平剂健那绿 （ JGB ） 、聚乙烯亚胺烷基盐 （ PN ） 与新型整平剂 SC-21 在电镀铜填充通孔过程中的作用差异。结果表明：以一定浓度 SC-21 为整平剂时可出现“蝴蝶填充”现象，进而实现对深径比 2 ∶ 1 通孔的无空洞填充；与 JGB 和 PN 相比，此浓度下的 SC-21 在较宽的电流密度范围内具有动态吸附行为，可产生“负微分电阻效应”，使得通孔内呈现与“蝴蝶填充”形状相匹配的沉铜速率梯度，最终实现对通孔的无空洞填充。
- Abstract:
- ： To solve the bottlenecks of the specialized chemicals for electronic electroplating in domestic ， a new leveler named SC-21 was synthesized. It was consisted of a nitrogen-containing heterocycle and an oxygen-containing carbon chain. In this paper ， the different performances between the common leveler of Janus Green B （ JGB ）， polyethyleneimine alkyl salt （ PN ） and the new leveler SC-21 were studied by copper plating in haring cell ， cyclic voltammetry （ CV ）， chronopotentiometry （ CP & CPCR ）， and electrochemical impedance spectroscopy （ EIS ） . The results indicate that the copper deposition mode of “ butterfly filling ” can be achieved using a certain concentration of SC-21 as the leveler. Finally ， the through holes with the depth to ratio of 2 ∶ 1 can be completely filled without void. Compared with JGB and PN ， SC-21 at this concentration showed a dynamic adsorption behavior in a wide range of current density ， which resulted in the appearance of "negative differential resistance effect" （ NDR effect ） . The NDR effect can lead to the velocity gradients of copper deposition in the through hole ， which finally resulted in the void-free filling of through holes.
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备注/Memo
收稿日期： 2023-10-07 修回日期： 2023-12-14 作者简介： 许昕莹（ 1997 —），女，硕士研究生， email ： 2021200172@mail.buct.edu.cn * 通信作者： 肖宁， email ： xiaoning@mail.buct.edu.cn 基金项目 ： 国家自然科学基金青年基金（ 21902010 ）?/html>