[1]李明旭*,李 欣,郭巧琴,等.doi: 10.3969/j.issn.1001-3849.2025.08.002磁控溅射铝薄膜的组织与性能研究[J].电镀与精饰,2025,(08):9-15.
　Li Mingxu *,Li Xin,Guo Qiaoqin *,et al.Study on the microstructure and properties of Al films prepared by magnetron sputtering[J].Plating & Finishing,2025,(08):9-15.
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doi: 10.3969/j.issn.1001-3849.2025.08.002磁控溅射铝薄膜的组织与性能研究()

《电镀与精饰》[ISSN:1001-3849/CN:12-1096/TG]

卷:
期数:
2025年08
页码:
9-15
栏目:
出版日期:
2025-08-31

文章信息/Info

Title:
Study on the microstructure and properties of Al films prepared by magnetron sputtering
作者:
李明旭1*; 李 欣2; 郭巧琴2; 齐源昊2; 雷 雨1
(1. 西安中核核仪器股份有限公司,陕西 西安 710061 ;2. 西安工业大学 材料与化工学院,陕西 西安 710032)
Author(s):
Li Mingxu1 *;  Li Xin2;  Guo Qiaoqin2 *;  Qi Yuanhao2;  Lei Yu1
(1. CNNC Xian Nuclear Instrument Co., Ltd., Xian 710061, China; 2. School of Materials Science and Chemical Engineering, Xian Technological University, Xian 710032, China)
关键词:
PET; 磁控溅射; 沉积时间; Al薄膜; 挡光性; 射线透过率
Keywords:
PET;  magnetron sputtering;  deposition time;  Al films;  light-blocking property;  ray transmittance
分类号:
TB79
文献标志码:
A
摘要:
核辐射探测器窗口所用材料聚对苯二甲酸乙二醇酯(PET)的厚度仅2 μm，材料质软、熔点低且表面张力较大，在其表面采用磁控溅射技术沉积纳米铝膜极其困难，目前该产品主要依赖进口。针对这一问题，本文采用磁控溅射离子镀技术在PET表面制备铝膜，采用扫描电子显微镜、原子力显微镜和X射线衍射仪观察和分析了铝薄膜的微观形貌及物相组成，采用划格法定性检测了铝薄膜与PET基体之间的结合力，并使用紫外—可见分光光度计和核辐射探测器分别表征了镀铝薄膜的挡光性和射线粒子的透过率。结果表明：Al晶粒为纳米晶、结晶细小致密，铝薄膜与PET基体结合紧密；随着沉积时间的增加，Al晶粒尺寸先增加后趋于稳定，铝薄膜的厚度先增大后减小。铝薄膜的挡光性、α、β粒子的平均透过率先提高后降低；当沉积时间为20 min时，铝薄膜的厚度最大为60.29 nm，光透过率最低为0.002%，α、β粒子平均透过率最高，分别为589.8 CPS和567.5 CPS。
Abstract:
The material used for the window of the nuclear radiation detector, polyethylene terephthalate (PET), has a thickness of only 2 μm. This material is soft, has a low melting point, and has a high surface tension. It is extremely difficult to deposit nano-aluminum films on its surface using magnetron sputtering technology. Therefore, currently, this product mainly depends on imports. In response to this issue, the Al film was deposited on the surface of PET by magnetron sputtering ion plating technology in this research. The microstructure and phase composition of the aluminum film were observed and analyzed using scanning electron microscopy, atomic force microscopy, and X-ray diffraction. The binding force between the aluminum film and the PET substrate was qualitatively detected using the scribing method, and the light blocking properties and X-ray particle transmittance of the aluminum coated film were characterized using ultraviolet-visible spectrophotometer and nuclear radiation detector, respectively. The result shows that the aluminum grains are nano crystals with fine and dense crystallization, and the aluminum films are closely combined with the PET substrate. With the increase of deposition time, the grain size of aluminum first increases and then tends to stabilize. Meanwhile, the thickness of the aluminum films first increases and then decreases. Moreover, the light-blocking property of the aluminum films and the average transmittance rates of α and β particles first increases and then decreases. When the deposition time is 20 min, the maximum thickness of the Al films is 60.29 nm, the lowest light transmittance is 0.002%, and the average transmittance of α and β particles is the highest, with the values being 589.8 CPS and 567.5 CPS respectively

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更新日期/Last Update: 2025-08-11