PDF下载 分享
[1]王槐乾,姜宏伟,王方标,等.工艺参数对磁控溅射TiN膜结构的影响[J].电镀与精饰,2019,(12):20-24.[doi:10.3969/j.issn.1001-3849.2019.12.005]
 WANG Huaiqian,JIANG Hongwei,WANG Fangbiao,et al.The Effect of Process Parameters on the Structure of Magnetron Sputtering TiN Films[J].Plating & Finishing,2019,(12):20-24.[doi:10.3969/j.issn.1001-3849.2019.12.005]
点击复制

工艺参数对磁控溅射TiN膜结构的影响

参考文献/References:

[1] Vera E E, Vite M, Lewis R, et al. A Study of the wear performance of TiN, CrN and WC/C coatings on different steel substrates[J] .Wear, 2011, 271(9-10):2116 -2124.
[2] Wayan D, Hiroshi U, Jean Q, et al. Clearance wear and normal force of TiN-coated P30 in cutting hardboards and wood-chip cement boards [J]. Holz RohWerkst, 2008, 66:89-97.
[3] 季鑫, 宓一鸣, 周细应. TiN 薄膜制备方法、性能及其应用的研究进展[J]. 热加工工艺, 2009, 4:81-84.
[4] Vaz F, Rebouta L, Goudeau P, et al. Structural transitions in hard Si-based TiN coatings:the effect of bias voltage and temperature[J]. Surface and Coatings Technology, 2001, 146-147:274-249.
[5] 宋慧瑾, 鄢强, 李玫. 金属氮化物和碳化物硬质涂层的研究及应用进展[J]. 材料导报, 2014, 28(24):491-493.
[6] 侯翔, 王铁钢, 刘源. 电弧离子镀 TiN 涂层沉积工艺研究[J]. 装备环境工程, 2019, 16:72-77.
[7] Lee S Y, Kim S D, Hong Y S. Application of the duplex TiN coatings to improve the tribological properties of electro hydrostatic actuator pump parts[J] . Surface and Coatings Technology, 2005, 193 (1/3):266-271.
[8] 白秀琴, 李健. 磁控溅射TiN薄膜低温沉积技术及其摩擦学性能研究[J]. 润滑与密封, 2006, 5:15-21.
[9] 刘齐成, 刘培英, 陶冶. CVD法与PCVD法TiN薄膜研究[J]. 材料工程, 2000, 12:22-25.
[10] 王有欣, 毛明旭, 王英才. 直流磁控溅射法在玻璃基片上制备TiN薄膜[J]. 中国表面工程, 2013, 26:60-65.
[11] 张栋, 孙丽丽, 汪爱英. 偏压对反应磁控溅射TiN薄膜结构以及性能的影响[J]. 真空, 2011, 48:55-57.
[12] 成靖文, 范洪远, 田颖萍. 氮气流量对反应磁控溅射TiN薄膜微结构与力学性能的影响[J]. 硬质合金, 2012, 29:203-207.
[13] 谢启, 付志强, 岳文. N2流量对等离子体增强磁控溅射TiN涂层的影响[J]. 表面技术, 2017, 46:161-167.
[14] Zhou T, Liu D W, Zhang Y, et al. Microstructure and hydrogen impermeability of titanium nitride thin films deposited by direct current reactive magnetron sputtering[J]. Journal of Alloys and Compounds, 2016, 688:44-50.
[15] Depla D, Buyle G, Haemers J, et al. Discharge voltage measurements during magnetron sputtering[J]. Surface and Coatings Technology, 2006, 200:4329-4338.

相似文献/References:

[1]刘 燕*,许彦伟,殷小健,等.紧固件真空镀铝层耐腐蚀性能评价[J].电镀与精饰,2020,(10):12.[doi:10.3969/j.issn.1001-3849.2020.10.0030]
 LIU Yan*,XU Yanwei,YIN Xiaojian,et al.Corrosion Resistance of Aluminum Coatings on Fastener[J].Plating & Finishing,2020,(12):12.[doi:10.3969/j.issn.1001-3849.2020.10.0030]
[2]白睿,武英桐,李晓敏,等.真空退火温度对磁控溅射氧化钒薄膜结构和光学性能的影响[J].电镀与精饰,2020,(11):25.[doi:10.3969/j.issn.1001-3849.2020.11.0060]
 BAI Rui,WU Yingtong,LI Xiaoming,et al.Influence of Vacuum Annealing Temperature on Structure and Optical Properties of the Vanadium Oxide Films by Magnetron Sputtering[J].Plating & Finishing,2020,(12):25.[doi:10.3969/j.issn.1001-3849.2020.11.0060]
[3]刘瑞霞*,朱福栋,由国艳.等离子体增强的磁控溅射TiSiN薄膜结构与耐蚀性[J].电镀与精饰,2021,(2):11.[doi:10.3969/j.issn.1001-3849.2021.02.0030]
 LIU Ruixia*,ZHU Fudong,YOU Guoyan.刘瑞霞*,朱福栋,由国艳[J].Plating & Finishing,2021,(12):11.[doi:10.3969/j.issn.1001-3849.2021.02.0030]

备注/Memo

收稿日期: 2019-06-16;修回日期: 2019-09-17
通信作者: 郑友进,email:zyjmsy@163.com
基金项目: 黑龙江省自然科学基金(LH2019E126);黑龙江省教育厅项目 (1352ZD002);牡丹江师范学院创新创业特色项目项目(CY2018020)

更新日期/Last Update: 2019-12-10